Research on the relationship of the probe system for the swing arm profilometer based on the point source microscope

Mingxing Gao; Hongwei Jing; Xuedong Cao; Lin Chen; Jie Yang

doi:10.1117/12.2186280

7 August 2015 Research on the relationship of the probe system for the swing arm profilometer based on the point source microscope

Mingxing Gao, Hongwei Jing, Xuedong Cao, Lin Chen, Jie Yang

Author Affiliations +

Proceedings Volume 9623, 2015 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 96230N (2015) https://doi.org/10.1117/12.2186280
Event: International Conference on Optical Instruments and Technology 2015, 2015, Beijing, China

Abstract

When using the swing arm profilometer (SAP) to measure the aspheric mirror and the off-axis aspheric mirror, the error of the effective arm length of the SAP has an obvious influence on the measurement result. In order to reduce the influence of the effective arm length and increase the measurement accuracy of the SAP, the laser tracker is adopted to measure the effective arm length. Because the space position relationship of the probe system for the SAP is needed to measured before using the laser tracker, the point source microscope (PSM) is used to measure the space positional relationship. The measurement principle of the PSM and other applications are introduced; the accuracy and repeatability of this technology are analysed; the advantages and disadvantages of this technology are summarized.

Citation Download Citation

Mingxing Gao, Hongwei Jing, Xuedong Cao, Lin Chen, and Jie Yang "Research on the relationship of the probe system for the swing arm profilometer based on the point source microscope", Proc. SPIE 9623, 2015 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 96230N (7 August 2015); https://doi.org/10.1117/12.2186280

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