Optical properties of LEDs with patterned 1D photonic crystal

P. Hronec; A. Kuzma; J. Škriniarová; J. Kováč Jr.; A. Benčurová; Š. Haščík; P. Nemec

doi:10.1117/12.2188127

20 August 2015 Optical properties of LEDs with patterned 1D photonic crystal

P. Hronec, A. Kuzma, J. Škriniarová, J. Kováč Jr., A. Benčurová, Š. Haščík, P. Nemec

Proceedings Volume 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII; 95561A (2015) https://doi.org/10.1117/12.2188127
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

In this paper we focus on the application of the one-dimensional photonic crystal (1D PhC) structures on the top of Al_0.295Ga_0.705As/GaAs multi-quantum well light emitting diode (MQW LED). 1D PhC structures with periods of 600 nm, 700 nm, 800 nm, and 900 nm were fabricated by the E-Beam Direct Write (EBDW) Lithography. Effect of 1D PhC period on the light extraction enhancement was studied. 1D PhC LED radiation profiles were obtained from Near Surface Light Emission Images (NSLEI). Measurements showed the strongest light extraction enhancement using 800 nm period of PhC. Investigation of PhC LED radiation profiles showed strong light decoupling when light reaches PhC structure. Achieved LEE was from 22.6% for 600 nm PhC LED to 47.0% for 800 nm PhC LED. LED with PhC structure at its surface was simulated by FDTD simulation method under excitation of appropriate launch field.

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P. Hronec, A. Kuzma, J. Škriniarová, J. Kováč Jr., A. Benčurová, Š. Haščík, and P. Nemec "Optical properties of LEDs with patterned 1D photonic crystal", Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 95561A (20 August 2015); https://doi.org/10.1117/12.2188127

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KEYWORDS

Light emitting diodes

Photonic crystals

Finite-difference time-domain method

Electron beam direct write lithography

Optical properties

Electron beam lithography

Lithography

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