Fusion: ultra-high-speed and IR image sensors

T. Goji Etoh; V. T. S. Dao; Quang A. Nguyen; M. Kimata

doi:10.1117/12.2190512

28 August 2015 Fusion: ultra-high-speed and IR image sensors

T. Goji Etoh, V. T. S. Dao, Quang A. Nguyen, M. Kimata

Proceedings Volume 9555, Optical Sensing, Imaging, and Photon Counting: Nanostructured Devices and Applications; 95550N (2015) https://doi.org/10.1117/12.2190512
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

Most targets of ultra-high-speed video cameras operating at more than 1 Mfps, such as combustion, crack propagation, collision, plasma, spark discharge, an air bag at a car accident and a tire under a sudden brake, generate sudden heat. Researchers in these fields require tools to measure the high-speed motion and heat simultaneously. Ultra-high frame rate imaging is achieved by an in-situ storage image sensor. Each pixel of the sensor is equipped with multiple memory elements to record a series of image signals simultaneously at all pixels. Image signals stored in each pixel are read out after an image capturing operation. In 2002, we developed an in-situ storage image sensor operating at 1 Mfps ¹⁾. However, the fill factor of the sensor was only 15% due to a light shield covering the wide in-situ storage area. Therefore, in 2011, we developed a backside illuminated (BSI) in-situ storage image sensor to increase the sensitivity with 100% fill factor and a very high quantum efficiency ²⁾. The sensor also achieved a much higher frame rate,16.7 Mfps, thanks to the wiring on the front side with more freedom ³⁾. The BSI structure has another advantage that it has less difficulties in attaching an additional layer on the backside, such as scintillators. This paper proposes development of an ultra-high-speed IR image sensor in combination of advanced nano-technologies for IR imaging and the in-situ storage technology for ultra-highspeed imaging with discussion on issues in the integration.

Conference Presentation

Citation Download Citation

T. Goji Etoh, V. T. S. Dao, Quang A. Nguyen, and M. Kimata "Fusion: ultra-high-speed and IR image sensors", Proc. SPIE 9555, Optical Sensing, Imaging, and Photon Counting: Nanostructured Devices and Applications, 95550N (28 August 2015); https://doi.org/10.1117/12.2190512

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