Binary pseudorandom test standard to determine the modulation transfer function of optical microscopes

Ian Lacey; Erik H. Anderson; Nikolay A. Artemiev; Sergey Babin; Stefano Cabrini; Guiseppe Calafiore; Elaine R. Chan; Wayne R. McKinney; Christophe Peroz; Peter Z. Takacs; Valeriy V. Yashchuk

doi:10.1117/12.2185191

1 September 2015 Binary pseudorandom test standard to determine the modulation transfer function of optical microscopes

Ian Lacey, Erik H. Anderson, Nikolay A. Artemiev, Sergey Babin, Stefano Cabrini, Guiseppe Calafiore, Elaine R. Chan, Wayne R. McKinney, Christophe Peroz, Peter Z. Takacs, Valeriy V. Yashchuk

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Proceedings Volume 9576, Applied Advanced Optical Metrology Solutions; 957608 (2015) https://doi.org/10.1117/12.2185191
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

This work reports on the development of a binary pseudo-random test sample optimized to calibrate the MTF of optical microscopes. The sample consists of a number of 1-D and 2-D patterns, with different minimum sizes of spatial artifacts from 300 nm to 2 microns. We describe the mathematical background, fabrication process, data acquisition and analysis procedure to return spatial frequency based instrument calibration. We show that the developed samples satisfy the characteristics of a test standard: functionality, ease of specification and fabrication, reproducibility, and low sensitivity to manufacturing error.

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Ian Lacey, Erik H. Anderson, Nikolay A. Artemiev, Sergey Babin, Stefano Cabrini, Guiseppe Calafiore, Elaine R. Chan, Wayne R. McKinney, Christophe Peroz, Peter Z. Takacs, and Valeriy V. Yashchuk "Binary pseudorandom test standard to determine the modulation transfer function of optical microscopes", Proc. SPIE 9576, Applied Advanced Optical Metrology Solutions, 957608 (1 September 2015); https://doi.org/10.1117/12.2185191

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KEYWORDS

Modulation transfer functions

Binary data

Calibration

Spatial frequencies

Standards development

Optical microscopes

Silicon

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