Current developments on optical asphere and freeform metrology

S. Mühlig; J. Siepmann; M. Lotz; A. Wiegmann; G. Blobel; S. Mika; A. Beutler; U. Nehse

doi:10.1117/12.2191247

24 September 2015 Current developments on optical asphere and freeform metrology

S. Mühlig, J. Siepmann, M. Lotz, A. Wiegmann, G. Blobel, S. Mika, A. Beutler, U. Nehse

Proceedings Volume 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V; 962812 (2015) https://doi.org/10.1117/12.2191247
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

Two techniques for the measurement of aspheres as well as freeforms are presented. The first method, the tilted wave interferometer, is a full aperture interferometric measurement method without any moving parts during the measurement. The second method applies an optical single point sensor in conjunction with two translational and one rotational axes. Both techniques are compared by measuring a selected asphere and a special freeform surface. Differences between both measurement principles are discussed.

Citation Download Citation

S. Mühlig, J. Siepmann, M. Lotz, A. Wiegmann, G. Blobel, S. Mika, A. Beutler, and U. Nehse "Current developments on optical asphere and freeform metrology", Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 962812 (24 September 2015); https://doi.org/10.1117/12.2191247

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