Ultra-broadband ptychography with self-consistent coherence estimation from a high harmonic source

M. Odstrčil; P. Baksh; H. Kim; S. A. Boden; W. S. Brocklesby; J. G. Frey

doi:10.1117/12.2188166

22 September 2015 Ultra-broadband ptychography with self-consistent coherence estimation from a high harmonic source

M. Odstrčil, P. Baksh, H. Kim, S. A. Boden, W. S. Brocklesby, J. G. Frey

Proceedings Volume 9589, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI; 958912 (2015) https://doi.org/10.1117/12.2188166
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

With the aim of improving imaging using table-top extreme ultraviolet sources, we demonstrate coherent diffraction imaging (CDI) with relative bandwidth of 20%. The coherence properties of the illumination probe are identified using the same imaging setup. The presented methods allows for the use of fewer monochromating optics, obtaining higher flux at the sample and thus reach higher resolution or shorter exposure time. This is important in the case of ptychography when a large number of diffraction patterns need to be collected. Our microscopy setup was tested on a reconstruction of an extended sample to show the quality of the reconstruction. We show that high harmonic generation based EUV tabletop microscope can provide reconstruction of samples with a large field of view and high resolution without additional prior knowledge about the sample or illumination.

Citation Download Citation

M. Odstrčil, P. Baksh, H. Kim, S. A. Boden, W. S. Brocklesby, and J. G. Frey "Ultra-broadband ptychography with self-consistent coherence estimation from a high harmonic source", Proc. SPIE 9589, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI, 958912 (22 September 2015); https://doi.org/10.1117/12.2188166

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