Metal-dielectric absorbers with magnetron sputtering technique

Catherine Grèzes-Besset; Hélène Krol; Grégory Chauveau; Dragan Stojcevski; Colin Bondet de la Bernardie; Myriam Zerrad; Simona Liukaityte; Michel Lequime; Claude Amra

doi:10.1117/12.2191694

23 September 2015 Metal-dielectric absorbers with magnetron sputtering technique

Catherine Grèzes-Besset, Hélène Krol, Grégory Chauveau, Dragan Stojcevski, Colin Bondet de la Bernardie, Myriam Zerrad, Simona Liukaityte, Michel Lequime, Claude Amra

Author Affiliations +

Proceedings Volume 9627, Optical Systems Design 2015: Advances in Optical Thin Films V; 96270U (2015) https://doi.org/10.1117/12.2191694
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

In this paper, we show how thin film absorbing coatings can be designed with multilayers using both metallic and dielectric materials involving some thicknesses that are very low down to some nanometers. Such multilayers enable to reach a very low level of reflectance and a zero value of transmittance, which can be a solution for stray light reduction in optical systems.

After a description of the design steps, we will present the manufacturing of such multilayer stacks using magnetron sputtering technique and we will see how such coating technique is very well suited for production due to its high process reproducibility even for very thin layers required in metal-dielectric absorbers.

Monitoring of such coatings is also presented with the help of a powerful in situ optical system developed in collaboration with Institut Fresnel that allows characterization of in-situ refractive indices of deposited materials and broadband monitoring of the multilayer stack.

Many results will be given on qualification samples, such as environmental tests and spectral characterizations that show the stability of the performances in severe environmental conditions.

At last, we will focus on the spectral and angular scattering behavior of such absorbing coatings and we will present several measurements performed on glass or metallic substrates with different roughnesses.

Citation Download Citation

Catherine Grèzes-Besset, Hélène Krol, Grégory Chauveau, Dragan Stojcevski, Colin Bondet de la Bernardie, Myriam Zerrad, Simona Liukaityte, Michel Lequime, and Claude Amra "Metal-dielectric absorbers with magnetron sputtering technique", Proc. SPIE 9627, Optical Systems Design 2015: Advances in Optical Thin Films V, 96270U (23 September 2015); https://doi.org/10.1117/12.2191694

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available