Analysis of optical flat flatness measuring method with phase-shifting laser interferometer

Xing-yu Yao

doi:10.1117/12.2199905

8 October 2015 Analysis of optical flat flatness measuring method with phase-shifting laser interferometer

Xing-yu Yao

Proceedings Volume 9677, AOPC 2015: Optical Test, Measurement, and Equipment; 96771Y (2015) https://doi.org/10.1117/12.2199905
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

Flatness of the optical flat measurement mainly has two methord: first is laser plane interferometer, second is the Phase-shifting Laser Interferometer. The two methods were compared by analysis. For the detection of high precision optical flat, expounds the principle and method of Phase-shifting Laser Interferometer. Uncertainty analysis was carried out to validate the approach, meet the flat verification regulation. The method is feasible.

Citation Download Citation

Xing-yu Yao "Analysis of optical flat flatness measuring method with phase-shifting laser interferometer", Proc. SPIE 9677, AOPC 2015: Optical Test, Measurement, and Equipment, 96771Y (8 October 2015); https://doi.org/10.1117/12.2199905

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