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Proceedings Article

Recent developments in IR metrology using quadri wave lateral shearing interferometry

[+] Author Affiliations
W. Boucher, G. Bourgeois, M. Deprez, E. Homassel, B. Wattellier

PHASICS S.A. (France)

Proc. SPIE 9633, Optifab 2015, 96331T (October 12, 2015); doi:10.1117/12.2195806
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From Conference Volume 9633

  • Optifab 2015
  • Julie L. Bentley; Sebastian Stoebenau
  • Rochester, New York, United States | October 12, 2015

abstract

We present various applications of Quadri Wave Lateral Shearing Interferometry to infrared optical metrology. Phasics has developed wave front sensors compatible with wavelengths ranging from 193nm to 14 μm. Several camera technologies are integrated with patented diffractive optics adapted to the various spectral ranges. In the infrared range, InGaAs, MCT and microbolometers are used as light sensors. We developed a bench to qualify lenses with diameter from 2mm to 100mm in the LWIR spectral range. Thanks to an innovative ray-trace algorithm, we are able to compare the wave front measurement to the optical design enabling a feedback between lens manufacture and design. We also developed a VSWIR wave front sensor with a constant accuracy from 0.4μm to 1.7 μm. It also includes the Extended Tilt feature that enables sub-mrad accuracy on tilt measurement over a range of more than +-30°. © (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

W. Boucher ; G. Bourgeois ; M. Deprez ; E. Homassel and B. Wattellier
" Recent developments in IR metrology using quadri wave lateral shearing interferometry ", Proc. SPIE 9633, Optifab 2015, 96331T (October 12, 2015); doi:10.1117/12.2195806; http://dx.doi.org/10.1117/12.2195806


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