Calibration of the lateral spring constant of atomic force microscope cantilevers

Yunpeng Song; Sen Wu; Linyan Xu; Xing Fu

doi:10.1117/12.2196523

15 October 2015 Calibration of the lateral spring constant of atomic force microscope cantilevers

Yunpeng Song, Sen Wu, Linyan Xu, Xing Fu

Proceedings Volume 9673, AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques; 96730B (2015) https://doi.org/10.1117/12.2196523
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

Atomic force microscope (AFM) is very useful in nano-scale force measurement. Lateral force is typically used in nanoscratch and surface friction measurement based on AFM. As one of the most important parameters to obtain lateral force, the lateral spring constant of AFM cantilever probe is of great significance and needs to be quantitative calibrated. Lateral torsion and lateral force of the cantilever are two parameters need to be measured in lateral spring constant calibration. In this article, we develop a calibration system and introduce a calibration method using an AFM head and an electromagnetic balance. An aluminium column with a known angel on top is placed on the weighing pan of the balance. The cantilever is precisely positioned in the AFM head, then approaches and bends on the aluminium column. During this procedure, the bending force and the lateral torsion of the cantilever are synchronously measured by the balance and an optical lever system, respectively. Then the lateral spring constant is calculated with a formula. By using this method, three kinds of rectangular cantilever are calibrated. The relative standard deviations of the calibration results are smaller than 2%.

Citation Download Citation

Yunpeng Song, Sen Wu, Linyan Xu, and Xing Fu "Calibration of the lateral spring constant of atomic force microscope cantilevers ", Proc. SPIE 9673, AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques, 96730B (15 October 2015); https://doi.org/10.1117/12.2196523

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available