Photomask linewidth comparison by PTB and NIST

D. Bergmann; B. Bodermann; H. Bosse; E. Buhr; G. Dai; R. Dixson; W. Häßler-Grohne; K. Hahm; M. Wurm

doi:10.1117/12.2199453

2 November 2015 Photomask linewidth comparison by PTB and NIST

D. Bergmann, B. Bodermann, H. Bosse, E. Buhr, G. Dai, R. Dixson, W. Häßler-Grohne, K. Hahm, M. Wurm

Proceedings Volume 9636, Scanning Microscopies 2015; 96360S (2015) https://doi.org/10.1117/12.2199453
Event: SPIE Scanning Microscopies, 2015, Monterey, California, United States

Abstract

We report the initial results of a recent bilateral comparison of linewidth or critical dimension (CD) calibrations on photomask line features between two national metrology institutes (NMIs): the National Institute of Standards and Technology (NIST) in the United States and the Physikalisch-Technische Bundesanstalt (PTB) in Germany. For the comparison, a chrome on glass (CoG) photomask was used which has a layout of line features down to 100 nm nominal size. Different measurement methods were used at both institutes. These included: critical dimension atomic force microscopy (CD-AFM), CD scanning electron microscopy (CD-SEM) and ultraviolet (UV) transmission optical microscopy. The measurands are CD at 50 % height of the features as well as sidewall angle and line width roughness (LWR) of the features. On the isolated opaque features, we found agreement of the CD measurements at the 3 nm to 5 nm level on most features – usually within the combined expanded uncertainties of the measurements.

Citation Download Citation

D. Bergmann, B. Bodermann, H. Bosse, E. Buhr, G. Dai, R. Dixson, W. Häßler-Grohne, K. Hahm, and M. Wurm "Photomask linewidth comparison by PTB and NIST", Proc. SPIE 9636, Scanning Microscopies 2015, 96360S (2 November 2015); https://doi.org/10.1117/12.2199453

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available