3D profile measurement of micro-structured array with light field microscope

Yao Hu; Haibo Gao; Shizhu Yuan; Rui Shi

doi:10.1117/12.2216738

5 November 2015 3D profile measurement of micro-structured array with light field microscope

Yao Hu, Haibo Gao, Shizhu Yuan, Rui Shi

Proceedings Volume 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015; 979523 (2015) https://doi.org/10.1117/12.2216738
Event: Selected Proceedings of the Photoelectronic Technology Committee Conferences held June-July 2015, 2015, Hefei, Suzhou, and Harbin, China

Abstract

Micro-structured array is a crucial optical element with wide range of applications. The optical performance of microstructured array is determined by feature sizes of array, such as diameter, depth and the uniformity across the whole array. Those sizes can be directed retrieved from the 3D profile. We propose a 3D profile measurement system based on light field microscope, which is promising in achieving fast data acquisition by one shot. We propose the principle of measurement, develop the algorithm for focus stack calculation and 3D reconstruction. Preliminary experiments suggest the prospects and challenges.

Citation Download Citation

Yao Hu, Haibo Gao, Shizhu Yuan, and Rui Shi "3D profile measurement of micro-structured array with light field microscope", Proc. SPIE 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015, 979523 (5 November 2015); https://doi.org/10.1117/12.2216738

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