High power coatings for line beam laser optics of up to 2-meter in length

Mathias Mende; Jürgen Kohlhaas; Wolfgang Ebert

doi:10.1117/12.2218436

22 April 2016 High power coatings for line beam laser optics of up to 2-meter in length

Mathias Mende, Jürgen Kohlhaas, Wolfgang Ebert

Proceedings Volume 9730, Components and Packaging for Laser Systems II; 973015 (2016) https://doi.org/10.1117/12.2218436
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

Laser material processing plays an important role in the fabrication of the crucial parts for state-of-the-art smartphones and tablets. With industrial line beam systems a line shaped beam with a length above one meter and an average power of several thousand watts can be realized. To ensure excellent long axis beam homogeneity, demanding specifications regarding the substrate surface form tolerances and the coating uniformity have to be achieved for each line beam optic. In addition, a high laser damage threshold and a low defect density are required for the coatings. In order to meet these requirements, the MAXIMA ion beam sputtering machine was developed and built by LASEROPTIK. This contribution describes the functional principle of MAXIMA deposition machine, which adapts the ion beam sputtering technology with its highest coating quality to the field of large area deposition. Furthermore, recent developments regarding the process control by optical broadband monitoring are discussed. Finally experimental results on different thin film characteristics as for example the coating uniformity, the microstructure and the laser damage resistance of multilayers are presented.

Citation Download Citation

Mathias Mende, Jürgen Kohlhaas, and Wolfgang Ebert "High power coatings for line beam laser optics of up to 2-meter in length", Proc. SPIE 9730, Components and Packaging for Laser Systems II, 973015 (22 April 2016); https://doi.org/10.1117/12.2218436

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available