Femtosecond laser processing of transparent materials for assembly-free fabrication of photonic microsensors

Lei Yuan; Yinan Zhang; Jie Huang; Jie Liu; Yang Song; Qi Zhang; Jincheng Lei; Hai Xiao

doi:10.1117/12.2213883

14 March 2016 Femtosecond laser processing of transparent materials for assembly-free fabrication of photonic microsensors

Lei Yuan, Yinan Zhang, Jie Huang, Jie Liu, Yang Song, Qi Zhang, Jincheng Lei, Hai Xiao

Author Affiliations +

Proceedings Volume 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI; 97351C (2016) https://doi.org/10.1117/12.2213883
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

In this paper, we summarize our recent research progresses on the understanding, design, fabrication, characterization of various photonic sensors for energy, defense, environmental, biomedical and industry applications. Femtosecond laser processing/ablation of various glass materials (fused silica, doped silica, sapphire, etc.) will be discussed towards the goal of one-step fabrication of novel photonic sensors and new enabling photonic devices. A number of new photonic devices and sensors will be presented.

Citation Download Citation

Lei Yuan, Yinan Zhang, Jie Huang, Jie Liu, Yang Song, Qi Zhang, Jincheng Lei, and Hai Xiao "Femtosecond laser processing of transparent materials for assembly-free fabrication of photonic microsensors", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 97351C (14 March 2016); https://doi.org/10.1117/12.2213883

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available