Nanoimprint of large-area optical gratings on a conventional photoresist using a teflon-coated nanoimprint mold

A. S. Jugessur; A. Zhang; Y. Lyu

doi:10.1117/12.2211162

14 March 2016 Nanoimprint of large-area optical gratings on a conventional photoresist using a teflon-coated nanoimprint mold

A. S. Jugessur, A. Zhang, Y. Lyu

Author Affiliations +

Proceedings Volume 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX; 97591C (2016) https://doi.org/10.1117/12.2211162
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

Nanoimprint Lithography is a promising high-throughput technology for the fabrication of optical nanostructures over large areas in the centimeter range. However, there are limitations (cost, proprietary and tool specific) of the commercial transfer resist. In this work, the photo-resist AZ1518 is investigated as a viable nanoimprint resist mask with a tefloncoated silicon mold. The results are comparable with a commercial nanoimprint resist. To our knowledge, the application of a conventional photoresist as the nanoimprint mask with teflon-coated mold is novel, providing a critical solution for cost-effective, flexible and high-throughput fabrication of optical nanostructures over large areas. Periodic gratings with lateral width of 100 nm and 200 nm pitch have been fabricated using this approach. The nanoimprint process parameters (pressure and temperature) are optimized to improve the release of the mold from the resist. In addition, the Teflon-coated mold improves the release process to avoid tearing of the mask.

Citation Download Citation

A. S. Jugessur, A. Zhang, and Y. Lyu "Nanoimprint of large-area optical gratings on a conventional photoresist using a teflon-coated nanoimprint mold", Proc. SPIE 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX, 97591C (14 March 2016); https://doi.org/10.1117/12.2211162

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