A two-axis water-immersible MEMS scanning mirror for scanning optical and acoustic microscopy

Song Xu; Chih-Hsien Huang; Jun Zou

doi:10.1117/12.2211752

15 March 2016 A two-axis water-immersible MEMS scanning mirror for scanning optical and acoustic microscopy

Song Xu, Chih-Hsien Huang, Jun Zou

Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 976003 (2016) https://doi.org/10.1117/12.2211752
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

Fast scanning is highly desired for both ultrasound and photoacoustic microscopic imaging. Limited by water environment required for acoustic propagation, traditional mircoelectromechanical system (MEMS) scanning mirrors could not be widely used. In this paper, a new water-immersible scanning mirror microsystem has been designed, fabricated and tested. Polymer hinges were employed to achieve reliable under water performance. Two pairs of high strength neodymium magnet disc and three compact RF choke inductor were used to actuate mirror module. Experimental results show that the fast axis can reach a mechanical scanning angle of ±15° at the resonance frequency of 350 Hz in air, and ±12.5° at the resonance frequency of 240 Hz in water, respectively. The slow axis can reach a mechanical scanning angle of ±15° at the resonance frequency of 20 Hz in air, and ±12.5° at the resonance frequency of 13 Hz in water, respectively. The two scanning axes have very different resonance frequencies, which are suitable for raster scanning.

Citation Download Citation

Song Xu, Chih-Hsien Huang, and Jun Zou "A two-axis water-immersible MEMS scanning mirror for scanning optical and acoustic microscopy", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 976003 (15 March 2016); https://doi.org/10.1117/12.2211752

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KEYWORDS

Mirrors

Microelectromechanical systems

Ultrasonography

Silicon

Acoustics

Polymers

Photoacoustic imaging

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