NEMS-based MIM plasmonics tunable filter

Kareem Khirallah; Mohamed A. Swillam

doi:10.1117/12.2218432

15 March 2016 NEMS-based MIM plasmonics tunable filter

Kareem Khirallah, Mohamed A. Swillam

Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 97600V (2016) https://doi.org/10.1117/12.2218432
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

Designing a miniaturized and efficient optical filter which can be actively tuned is a modern engineering challenge. This paper propose a design of a device with a nano scale size for active tuning the resonance frequency of a metal-insulator-metal plasmonics optical filter. The design is based on controlling the relative position between two stubs in metal-Insulator-metal plasmonics waveguide using NEMS technology. The mechanical design parameter is chosen carefully to be compatible with modern fabrication technology and a reasonable fabrication process of the device is proposed. The analysis of the mechanical and optical design is done and shows a promising performance. For the chosen mechanical design parameters, the optical resonance wavelength can be tuned from 1.45μm to 1.65μm using 7VDC actuation voltage.

Citation Download Citation

Kareem Khirallah and Mohamed A. Swillam "NEMS-based MIM plasmonics tunable filter", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600V (15 March 2016); https://doi.org/10.1117/12.2218432

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