Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source

Akira Sasaki; Katsunobu Nishihara; Atushi Sunahara; Hiroyuki Furukawa; Takeshi Nishikawa

doi:10.1117/12.2219045

18 March 2016 Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source

Akira Sasaki, Katsunobu Nishihara, Atushi Sunahara, Hiroyuki Furukawa, Takeshi Nishikawa

Author Affiliations +

Proceedings Volume 9776, Extreme Ultraviolet (EUV) Lithography VII; 97762C (2016) https://doi.org/10.1117/12.2219045
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

We develop a new simulation code for the optimization of efficiency of the laser pumped plasma (LPP) extreme ultra violet (EUV) light source, which is applicable to the pre-plasma formation from a tin droplet target irradiated by a pre-pulse laser. We investigate algorithms of reorganization of the mesh for the Lagrangian hydrodynamics simulation. We also investigate the model of the liquid to gas phase transition to calculate the dynamics of particle formation through the laser ablation.

Citation Download Citation

Akira Sasaki, Katsunobu Nishihara, Atushi Sunahara, Hiroyuki Furukawa, and Takeshi Nishikawa "Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source", Proc. SPIE 9776, Extreme Ultraviolet (EUV) Lithography VII, 97762C (18 March 2016); https://doi.org/10.1117/12.2219045

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