Study on structural and optical properties of TiO2 ALD coated silicon nanostructures

Mykola Pavlenko; Valerii Myndrul; Igor Iatsunskyi; Stefan Jurga; Valentyn Smyntyna

doi:10.1117/12.2227122

21 April 2016 Study on structural and optical properties of TiO₂ ALD coated silicon nanostructures

Mykola Pavlenko, Valerii Myndrul, Igor Iatsunskyi, Stefan Jurga, Valentyn Smyntyna

Proceedings Volume 9884, Nanophotonics VI; 98842H (2016) https://doi.org/10.1117/12.2227122
Event: SPIE Photonics Europe, 2016, Brussels, Belgium

Abstract

Structural and optical properties of TiO2 ALD coated silicon nanostructures were investigated. The morphology and chemical composition of TiO2 coated silicon nanopillars and porous silicon were studied by using methods of scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDX). Optical characteristics were studied using measurements of reflectance and luminescence spectra. Detailed analysis of morphological features and photoluminescence mechanisms were provided. Peculiarities of reflectance spectra were discussed. It was shown the possible application of these structures as antireflectance coatings.

Citation Download Citation

Mykola Pavlenko, Valerii Myndrul, Igor Iatsunskyi, Stefan Jurga, and Valentyn Smyntyna "Study on structural and optical properties of TiO₂ ALD coated silicon nanostructures", Proc. SPIE 9884, Nanophotonics VI, 98842H (21 April 2016); https://doi.org/10.1117/12.2227122

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available