Micro-resonators are fundamental components integrated in a hosts of MEMS applications: safety and stability systems, biometric sensors, switches, mechanical filters, micro-mirror devices, material characterization, gyroscopes, etc. A constituent part of the micro-resonator is a diffractive optical element (DOE). Different methods and materials are used to produce diffraction gratings for DOEs. Two-dimensional or three-dimensional periodic structures of micrometer-scale period are widely used in microsystems or their components. They can be used as elements for micro-scale synthesis, processing, and analysis of chemical and biological samples. On the other hand micro-resonator was designed using composite piezoelectric material. In case when microscopes, vibrometers or other direct measurement methods are destructive and hardly can be employed for in-situ analysis, indirect measurement of electrical signal generated by composite piezoelectric layer allows to measure natural frequency changes. Also piezoelectric layer allows to create a novel micro-resonator with controllable parameters, which could assure much higher functionality of micro-electromechanical systems. The novel micro-resonator for pollution detection is proposed. Mathematical model of the micro-resonator and its dynamical, electrical and optical characteristics are presented.
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Giedrius Janusas ; Arvydas Palevicius ; Elingas Cekas ; Alfredas Brunius and Jokubas Bauce
Development and analysis of new type microresonator with electro-optic feedback
", Proc. SPIE 9889, Optical Modelling and Design IV, 98891N (April 27, 2016); doi:10.1117/12.2228789; http://dx.doi.org/10.1117/12.2228789