Refractive index sensitivity of optical fiber lossy-mode resonance sensors based on atomic layer deposited TiOx thin overlay

Dariusz Burnat; Marcin Koba; Łukasz Wachnicki; Sylwia Gierałtowska; Marek Godlewski; Mateusz Śmietana

doi:10.1117/12.2236908

30 May 2016 Refractive index sensitivity of optical fiber lossy-mode resonance sensors based on atomic layer deposited TiO_x thin overlay

Dariusz Burnat, Marcin Koba, Łukasz Wachnicki, Sylwia Gierałtowska, Marek Godlewski, Mateusz Śmietana

Author Affiliations +

Proceedings Volume 9916, Sixth European Workshop on Optical Fibre Sensors; 99161G (2016) https://doi.org/10.1117/12.2236908
Event: Sixth European Workshop on Optical Fibre Sensors (EWOFS'2016), 2016, Limerick, Ireland

Abstract

This work presents an optical fiber refractive index sensors based on lossy–mode resonance (LMR) effect supported by titanium oxide (TiO_x) thin overlay. The TiO_x overlays of different thickness were deposited on core of polymer-clad silica (PCS) fibers using atomic layer deposition (ALD) method. Based on numerical simulations, a number of structures differing in the location of exposed core area and the thickness of TiO_x coatings were designed. For fabricated structures the spectral response to external refractive index (n_ext) was measured. The maximum sensitivity reaches 634.2 nm/RIU (n_ext range: 1.357 - 1.402 RIU; TiO_x coating thickness: 260.9 nm; investigated spectral range: 500-800 nm) and it highly depends on the thin-film thickness.

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Dariusz Burnat, Marcin Koba, Łukasz Wachnicki, Sylwia Gierałtowska, Marek Godlewski, and Mateusz Śmietana "Refractive index sensitivity of optical fiber lossy-mode resonance sensors based on atomic layer deposited TiO_x thin overlay", Proc. SPIE 9916, Sixth European Workshop on Optical Fibre Sensors, 99161G (30 May 2016); https://doi.org/10.1117/12.2236908

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