Responsivity improvements for a vanadium oxide microbolometer using subwavelength resonant absorbers

Evan M. Smith; Janardan Nath; James Ginn III; Robert E. Peale; David Shelton

doi:10.1117/12.2223954

20 May 2016 Responsivity improvements for a vanadium oxide microbolometer using subwavelength resonant absorbers

Evan M. Smith, Janardan Nath, James Ginn III, Robert E. Peale, David Shelton

Proceedings Volume 9819, Infrared Technology and Applications XLII; 98191Q (2016) https://doi.org/10.1117/12.2223954
Event: SPIE Defense + Security, 2016, Baltimore, MD, United States

Abstract

Subwavelength resonant structures designed for long-wave infrared (LWIR) absorption have been integrated with a standard vanadium-oxide microbolometer. Dispersion of the dielectric refractive index provides for multiple overlapping resonances that span the 8-12 μm LWIR wavelength band, a broader range than can be achieved using the usual quarter-wave resonant cavity engineered into the air-bridge structures. Experimental measurements show a 49% increase in responsivity for LWIR and a 71% increase across a full waveband as compared to a similar device designed for only LWIR absorption, using a 300°C blackbody at 35 Hz chopping rate. Increased thermal time constant due to additional mass is shown to lessen this enhancement at higher chopping rates.

Citation Download Citation

Evan M. Smith, Janardan Nath, James Ginn III, Robert E. Peale, and David Shelton "Responsivity improvements for a vanadium oxide microbolometer using subwavelength resonant absorbers", Proc. SPIE 9819, Infrared Technology and Applications XLII, 98191Q (20 May 2016); https://doi.org/10.1117/12.2223954

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