Paper
1 June 2016 Experimental verification of phase retrieval of microbeads in high-speed phase imaging using digital holography
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Abstract
One of fast measurement systems of μm-size phase objects based on digital holographic microscope with transmission geometry is presented. For building a 3D inspection system of the phase objects, the improvement of recovered phase image is discussed. Under the CW laser illumination, the movement afterimage of phase object was observed. The phase object is recovered by deconvolution filter. Experimental and numerical evaluation are presented.
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Osamu Matoba, Peng Xia, Xiangyu Quan, Naoya Nagahama, Shunsuke Tanimoto, Kouichi Nitta, and Yasuhiro Awatsuji "Experimental verification of phase retrieval of microbeads in high-speed phase imaging using digital holography", Proc. SPIE 9867, Three-Dimensional Imaging, Visualization, and Display 2016, 98670K (1 June 2016); https://doi.org/10.1117/12.2229727
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KEYWORDS
Digital holography

Holograms

Deconvolution

Holography

Image sensors

3D metrology

Microscopes

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