Adaptive laser beam forming for laser shock micro-forming for 3D MEMS devices fabrication

Ran Zou; Shuliang Wang; Mohan Wang; Shuo Li; Sheng Huang; Yankun Lin; Kevin P. Chen

doi:10.1117/12.2241123

22 July 2016 Adaptive laser beam forming for laser shock micro-forming for 3D MEMS devices fabrication

Ran Zou, Shuliang Wang, Mohan Wang, Shuo Li, Sheng Huang, Yankun Lin, Kevin P. Chen

Proceedings Volume 9983, Pacific Rim Laser Damage 2016: Optical Materials for High-Power Lasers; 99830U (2016) https://doi.org/10.1117/12.2241123
Event: Pacific Rim Laser Damage 2016: Optical Materials for High Power Lasers, 2016, Yokohama, Japan

Abstract

Laser shock micro-forming is a non-thermal laser forming method that use laser-induced shockwave to modify surface properties and to adjust shapes and geometry of work pieces. In this paper, we present an adaptive optical technique to engineer spatial profiles of the laser beam to exert precision control on the laser shock forming process for free-standing MEMS structures. Using a spatial light modulator, on-target laser energy profiles are engineered to control shape, size, and deformation magnitude, which has led to significant improvement of the laser shock processing outcome at micrometer scales. The results presented in this paper show that the adaptive-optics laser beam forming is an effective method to improve both quality and throughput of the laser forming process at micrometer scales.

Citation Download Citation

Ran Zou, Shuliang Wang, Mohan Wang, Shuo Li, Sheng Huang, Yankun Lin, and Kevin P. Chen "Adaptive laser beam forming for laser shock micro-forming for 3D MEMS devices fabrication", Proc. SPIE 9983, Pacific Rim Laser Damage 2016: Optical Materials for High-Power Lasers, 99830U (22 July 2016); https://doi.org/10.1117/12.2241123

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