Dual-phase-shift schemes for internal-reflection noise reduction in a Fizeau interferometer

Toshiki Kumagai; Kenichi Hibino; Yasunari Nagaike

doi:10.1117/12.2237494

28 August 2016 Dual-phase-shift schemes for internal-reflection noise reduction in a Fizeau interferometer

Toshiki Kumagai, Kenichi Hibino, Yasunari Nagaike

Proceedings Volume 9960, Interferometry XVIII; 99600C (2016) https://doi.org/10.1117/12.2237494
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

A method to reduce the phase measurement errors generated from internal-reflection light noise in a Fizeau interferometer is proposed. In addition to an ordinary phase-shift by a mechanical translation of the reference surface, the test surface is also mechanically translated between each phase measurement to further modulate the signal phase. For spherical tests, a mechanical phase-shift generally generates a spatial non-uniformity in the phase increment across the observing aperture. It is shown that a minimum of three positional measurements is necessary to cancel out the systematic error caused by this non-uniformity. Linear combinations of the three measured phases can also cancel the additional primary spherical aberrations that occur when the test surface is out of the null position of the confocal configuration.

Conference Presentation

Citation Download Citation

Toshiki Kumagai, Kenichi Hibino, and Yasunari Nagaike "Dual-phase-shift schemes for internal-reflection noise reduction in a Fizeau interferometer", Proc. SPIE 9960, Interferometry XVIII, 99600C (28 August 2016); https://doi.org/10.1117/12.2237494

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