The analysis of temperature effect and temperature compensation of MOEMS accelerometer based on a grating interferometric cavity

Dandan Han; Jian Bai; Qianbo Lu; Shuqi Lou; Xufen Jiao; Guoguang Yang

doi:10.1117/12.2236584

28 August 2016 The analysis of temperature effect and temperature compensation of MOEMS accelerometer based on a grating interferometric cavity

Dandan Han, Jian Bai, Qianbo Lu, Shuqi Lou, Xufen Jiao, Guoguang Yang

Author Affiliations +

Proceedings Volume 9960, Interferometry XVIII; 99600X (2016) https://doi.org/10.1117/12.2236584
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

There is a temperature drift of an accelerometer attributed to the temperature variation, which would adversely influence the output performance. In this paper, a quantitative analysis of the temperature effect and the temperature compensation of a MOEMS accelerometer, which is composed of a grating interferometric cavity and a micromachined sensing chip, are proposed. A finite-element-method (FEM) approach is applied in this work to simulate the deformation of the sensing chip of the MOEMS accelerometer at different temperature from -20°C to 70°C. The deformation results in the variation of the distance between the grating and the sensing chip of the MOEMS accelerometer, modulating the output intensities finally. A static temperature model is set up to describe the temperature characteristics of the accelerometer through the simulation results and the temperature compensation is put forward based on the temperature model, which can improve the output performance of the accelerometer. This model is permitted to estimate the temperature effect of this type accelerometer, which contains a micromachined sensing chip. Comparison of the output intensities with and without temperature compensation indicates that the temperature compensation can improve the stability of the output intensities of the MOEMS accelerometer based on a grating interferometric cavity.

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Citation Download Citation

Dandan Han, Jian Bai, Qianbo Lu, Shuqi Lou, Xufen Jiao, and Guoguang Yang "The analysis of temperature effect and temperature compensation of MOEMS accelerometer based on a grating interferometric cavity", Proc. SPIE 9960, Interferometry XVIII, 99600X (28 August 2016); https://doi.org/10.1117/12.2236584

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