Glancing angle deposition for production of optical components in UV region

Tomas Tolenis; Lina Grinevičiūtė; Rytis Buzelis; Laurynas Petronis; Ramutis Drazdys

doi:10.1117/12.2237120

26 September 2016 Glancing angle deposition for production of optical components in UV region

Tomas Tolenis, Lina Grinevičiūtė, Rytis Buzelis, Laurynas Petronis, Ramutis Drazdys

Proceedings Volume 9929, Nanostructured Thin Films IX; 99290D (2016) https://doi.org/10.1117/12.2237120
Event: SPIE Nanoscience + Engineering, 2016, San Diego, California, United States

Abstract

Technological developments in laser technology require advancements in optical components. Such demand is particularly important in UV spectral region. Antireflection coatings (AR) and waveplates as a widely used optical elements were produced based on glancing angle deposition (GLAD) method. Superior optical performance was measured for AR thin films. Broadband and broad-angle antireflection coatings were manufactured by using multilayer system when changing the refractive index profile by varying the porosity of material. SiO₂, Al₂O₃ and LaF₃ materials were used for formation of waveplates for UV region. An investigation of optical and resistant performance were conducted. All materials showed optical losses at the wavelength of 355 nm. Possible technological solutions are presented and investigated.

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Citation Download Citation

Tomas Tolenis, Lina Grinevičiūtė, Rytis Buzelis, Laurynas Petronis, and Ramutis Drazdys "Glancing angle deposition for production of optical components in UV region", Proc. SPIE 9929, Nanostructured Thin Films IX, 99290D (26 September 2016); https://doi.org/10.1117/12.2237120

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