Optical properties of a-C:H thin films modified by Ti and Ag

Oleg Yu. Prikhodko; Svetlana L. Mikhailova; Ershan C. Mukhametkarimov; Suyumbika Ya. Maksimova; Nurlan K. Manabaev; Kuanysh Dauthan

doi:10.1117/12.2238455

26 September 2016 Optical properties of a-C:H thin films modified by Ti and Ag

Oleg Yu. Prikhodko, Svetlana L. Mikhailova, Ershan C. Mukhametkarimov, Suyumbika Ya. Maksimova, Nurlan K. Manabaev, Kuanysh Dauthan

Author Affiliations +

Proceedings Volume 9929, Nanostructured Thin Films IX; 99291G (2016) https://doi.org/10.1117/12.2238455
Event: SPIE Nanoscience + Engineering, 2016, San Diego, California, United States

Abstract

Structure and optical properties of amorphous diamond-like carbon (a-C: H) thin films modified with Ag, Ti and Ag + Ti metal impurities are studied. The films were prepared by ion-plasma magnetron sputtering of combined polycrystalline graphite and metal target in the mixture of Ar and CH₄ gases. AFM, SEM and TEM methods show that a-C:H<Ag+Ti> films are heterogeneous, nanostructured and characterized by the presence of silver nanoclusters on the surface sized ~ 60 nm and both Ti and Ag nanoclusters with a mean size ~ (2 ÷ 3) nm in the bulk of films. It was found that in a- C:H<Ag+Ti> films as well as in a-C:H<Ag> films plasma resonance absorption due to excitation of surface plasmons in silver nanoclusters in the visible region of spectrum takes place. Intensity of the resonance absorption in the a- C:H<Ag+Ti> films increases with increase in concentration of silver. The results are important for produce of nanomaterials with nonlinear optical properties based on the amorphous diamond-like carbon films containing metal nanoclusters.

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Oleg Yu. Prikhodko, Svetlana L. Mikhailova, Ershan C. Mukhametkarimov, Suyumbika Ya. Maksimova, Nurlan K. Manabaev, and Kuanysh Dauthan "Optical properties of a-C:H thin films modified by Ti and Ag", Proc. SPIE 9929, Nanostructured Thin Films IX, 99291G (26 September 2016); https://doi.org/10.1117/12.2238455

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