Study of the formation of native oxide on copper at room temperature

Juan J. Díaz León; David M. Fryauf; Robert D. Cormia; Nobuhiko P. Kobayashi

doi:10.1117/12.2238745

27 September 2016 Study of the formation of native oxide on copper at room temperature

Juan J. Díaz León, David M. Fryauf, Robert D. Cormia, Nobuhiko P. Kobayashi

Proceedings Volume 9924, Low-Dimensional Materials and Devices 2016; 99240O (2016) https://doi.org/10.1117/12.2238745
Event: SPIE Nanoscience + Engineering, 2016, San Diego, California, United States

Abstract

Native oxide grown on copper has been a nuisance in electrical devices due to extra electrical resistance added to copper electrodes. However, copper oxide, known to have two primary stable phases, cuprous oxide (Cu₂O) and cupric oxide (CuO), is a material worth investigating for electronic applications. These two phases exhibiting distinctive electrical characteristics, would make copper oxide a prospective material for resistive switches. Cu₂O and CuO often form concurrently within the native oxide. Because of their similar refractive index and extinction coefficient, optically differentiating these two phases is a challenge, yet it is critical for designing devices. In this study, thin copper films were deposited using electron-beam evaporation and sputtering. A native oxide was grown on the prepared copper films over 250 days in air and periodically evaluated with reflectometry-ellipsometry. X-ray photoelectron spectroscopy was also performed on the samples aged for 7 months to obtain their chemical characteristics. A comprehensive analysis on the progressive formation of native oxide on copper is discussed.

Citation Download Citation

Juan J. Díaz León, David M. Fryauf, Robert D. Cormia, and Nobuhiko P. Kobayashi "Study of the formation of native oxide on copper at room temperature", Proc. SPIE 9924, Low-Dimensional Materials and Devices 2016, 99240O (27 September 2016); https://doi.org/10.1117/12.2238745

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available