The CD control improvement by using CDSEM 2D measurement of complex OPC patterns

William Chou; Jeffrey Cheng; Adder Lee; James Cheng; Alex CP Tzeng; Colbert Lu; Ray Yang; Hong Jen Lee; Hideaki Bandoh; Izumi Santo; Hao Zhang; Chien Kang Chen

doi:10.1117/12.2241326

4 October 2016 The CD control improvement by using CDSEM 2D measurement of complex OPC patterns

William Chou, Jeffrey Cheng, Adder Lee, James Cheng, Alex CP Tzeng, Colbert Lu, Ray Yang, Hong Jen Lee, Hideaki Bandoh, Izumi Santo, Hao Zhang, Chien Kang Chen

Author Affiliations +

Proceedings Volume 9985, Photomask Technology 2016; 99851M (2016) https://doi.org/10.1117/12.2241326
Event: SPIE Photomask Technology, 2016, San Jose, California, United States

Abstract

As the process node becomes more advanced, the accuracy and precision in OPC pattern CD are required in mask manufacturing. CD SEM is an essential tool to confirm the mask quality such as CD control, CD uniformity and CD mean to target (MTT). Unfortunately, in some cases of arbitrary enclosed patterns or aggressive OPC patterns, for instance, line with tiny jogs and curvilinear SRAF, CD variation depending on region of interest (ROI) is a very serious problem in mask CD control, even it decreases the wafer yield. For overcoming this situation, the 2-dimensional (2D) method by Holon is adopted. In this paper, we summarize the comparisons of error budget between conventional (1D) and 2D data using CD SEM and the CD performance between mask and wafer by complex OPC patterns including ILT features.

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William Chou, Jeffrey Cheng, Adder Lee, James Cheng, Alex CP Tzeng, Colbert Lu, Ray Yang, Hong Jen Lee, Hideaki Bandoh, Izumi Santo, Hao Zhang, and Chien Kang Chen "The CD control improvement by using CDSEM 2D measurement of complex OPC patterns", Proc. SPIE 9985, Photomask Technology 2016, 99851M (4 October 2016); https://doi.org/10.1117/12.2241326

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