High resolution patterning on AgInSbTe thin films by laser thermal lithography

Qijun Zhou; Kui Zhang; Tao Wei; Jingsong Wei

doi:10.1117/12.2248173

12 October 2016 High resolution patterning on AgInSbTe thin films by laser thermal lithography

Qijun Zhou, Kui Zhang, Tao Wei, Jingsong Wei

Proceedings Volume 9818, 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage; 98180Y (2016) https://doi.org/10.1117/12.2248173
Event: 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage, 2016, Changzhou, China

Abstract

Fabrication of high-resolution micro-structures is essential for DOEs and MEMS and has attracted increasing attention. In this study, several high-resolution micro-structures have been fabricated on AgInSbTe phase-change films by laser thermal lithography, and the minimum linewidth of these structures is about 200 nm, which is smaller than the size of the focused spot. The results indicate that laser thermal lithography is a simple and effective technique for the fabrication of micro-structures on AgInSbTe phase-change thin films.

Citation Download Citation

Qijun Zhou, Kui Zhang, Tao Wei, and Jingsong Wei "High resolution patterning on AgInSbTe thin films by laser thermal lithography", Proc. SPIE 9818, 2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage, 98180Y (12 October 2016); https://doi.org/10.1117/12.2248173

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