Application of double laser interferometer in the measurement of translational stages' roll characteristics

Tao Jin; Lu Shen; Youlong Ke; Wenmei Hou; Aisong Ju; Wei Yang; Jialin Luo

doi:10.1117/12.2246765

19 October 2016 Application of double laser interferometer in the measurement of translational stages' roll characteristics

Tao Jin, Lu Shen, Youlong Ke, Wenmei Hou, Aisong Ju, Wei Yang, Jialin Luo

Author Affiliations +

Proceedings Volume 10155, Optical Measurement Technology and Instrumentation; 101551Y (2016) https://doi.org/10.1117/12.2246765
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China

Abstract

In order to achieve rapid measurement of larger travel translation stages’ roll-angle error in industry and to study the roll characteristics, this paper designs a small roll-angle measurement system based on laser heterodyne interferometry technology, test and researched on the roll characteristics of ball screw linear translation stage to fill the blank of the market. The results show that: during the operation of the ball screw linear translation stage, the workbench’s roll angle changes complexly, its value is not only changing with different positions, but also shows different levels of volatility, what’s more, the volatility varies with the workbench’s work speed . Because of the non uniform stiffness of ball screw, at the end of each movement, the elastic potential energy being stored from the working process should release slowly, and the workbench will cost a certain time to roll fluctuate before it achieves a stable tumbling again.

Citation Download Citation

Tao Jin, Lu Shen, Youlong Ke, Wenmei Hou, Aisong Ju, Wei Yang, and Jialin Luo "Application of double laser interferometer in the measurement of translational stages' roll characteristics", Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 101551Y (19 October 2016); https://doi.org/10.1117/12.2246765

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