The micro spectral measurement of micro integrated filters

Xiaofeng Ma; Sheng Zhou; Yuan Cai; Dingquan Liu

doi:10.1117/12.2247041

19 October 2016 The micro spectral measurement of micro integrated filters

Xiaofeng Ma, Sheng Zhou, Yuan Cai, Dingquan Liu

Proceedings Volume 10155, Optical Measurement Technology and Instrumentation; 101552J (2016) https://doi.org/10.1117/12.2247041
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China

Abstract

Theory of micro spectral transmittance measurement and its characteristics have been analyzed. Measurement procedures and data processing method have been introduced. Micro spectral transmittance of micro integrated filters has been measured using PerkinElmer Lambda 1050 spectrophotometer with the combination of a Schwarzschild optical system microscope accessory, and the measured quantitative analysis results have been obtained. The incidence focused light spot size is about 20*40 um². At last, micro spectral transmittance results for micro integrated filters have been compared with the spectral transmittance for large size samples, which are fabricated under the same condition and measured at normal incidence. The focused incidence for micro spectral measurement will cause a wavelength shift towards the shorter and a deformation transmittance curve, but those changes are in agreement with their theoretical simulations.

Citation Download Citation

Xiaofeng Ma, Sheng Zhou, Yuan Cai, and Dingquan Liu "The micro spectral measurement of micro integrated filters", Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 101552J (19 October 2016); https://doi.org/10.1117/12.2247041

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