Method to fabricate orthogonal crossed gratings by an interference fringe based alignment technique

Hengyan Zhou; Lijiang Zeng

doi:10.1117/12.2247443

19 October 2016 Method to fabricate orthogonal crossed gratings by an interference fringe based alignment technique

Hengyan Zhou, Lijiang Zeng

Proceedings Volume 10155, Optical Measurement Technology and Instrumentation; 101553Q (2016) https://doi.org/10.1117/12.2247443
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China

Abstract

In order to fabricate orthogonal crossed gratings, we propose an interference fringe based alignment technique to adjust the angle between the two Lloyd’s mirrors to be 90° in the dual Lloyd’s mirror interferometer. An exposed crossed grating is put back to the exposure system and rotated about 90° around its normal direction. By observing the fringe spacing of the interference fringes generated by the diffracted beams of different orders, we can adjust the angle between the two Lloyd’s mirrors to be 90°. Simulation results indicate an orthogonality error smaller than 4″ can be obtained by this method. We fabricated a crossed grating with 0.30″ orthogonality error.

Citation Download Citation

Hengyan Zhou and Lijiang Zeng "Method to fabricate orthogonal crossed gratings by an interference fringe based alignment technique", Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 101553Q (19 October 2016); https://doi.org/10.1117/12.2247443

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