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Proceedings Article

Reticle inspection equipment productivity increase using SEMI specification for reticle and pod management

[+] Author Affiliations
Ron Taylor, Jack Downey, Jeffrey Wood, Yen-Hung Lin

GLOBALFOUNDRIES Inc. (United States)

Bharathi Bugata, Dongsheng Fan, Carl Hess, Mark Wylie

KLA-Tencor Corp. (United States)

Proc. SPIE 9985, Photomask Technology 2016, 99850L (October 25, 2016); doi:10.1117/12.2241129
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From Conference Volume 9985

  • Photomask Technology 2016
  • Bryan S. Kasprowicz; Peter D. Buck
  • San Jose, California, United States | September 12, 2016

abstract

In this work, the SEMI specification for reticle and pod management (E109) with internal reticle library support has been integrated for the first time on KLA-Tencor’s TeronTM and TeraScanTM reticle inspection tools. Manufacturing Execution System scheduling reticle jobs and Automated Material Handling System scheduling to transfer pods simultaneously have also been integrated and tested. GLOBALFOUNDRIES collaboratively worked with KLA-Tencor to successfully implement these capabilities. Both library and non-library scenarios have been demonstrated for comparison in a real production environment resulting in productivity increase of approximately 29% by making use of the library. Reticle re-qualification test cases were used for the comparison in this work. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Ron Taylor ; Jack Downey ; Jeffrey Wood ; Yen-Hung Lin ; Bharathi Bugata, et al.
" Reticle inspection equipment productivity increase using SEMI specification for reticle and pod management ", Proc. SPIE 9985, Photomask Technology 2016, 99850L (October 25, 2016); doi:10.1117/12.2241129; http://dx.doi.org/10.1117/12.2241129


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