Optical properties of two-dimensional ZnO array generated by template method

Xiu Li; Xiu Yan Chen; Gao Chao Zhu; Shan Shan Wang; Si Yu Chen

doi:10.1117/12.2247056

25 October 2016 Optical properties of two-dimensional ZnO array generated by template method

Xiu Li, Xiu Yan Chen, Gao Chao Zhu, Shan Shan Wang, Si Yu Chen

Proceedings Volume 10156, Hyperspectral Remote Sensing Applications and Environmental Monitoring and Safety Testing Technology; 101561F (2016) https://doi.org/10.1117/12.2247056
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China

Abstract

As one of the most interesting II–IV compound semiconductors, ZnO has large band gap (3.37 eV) and high excitonic binding energy (60 meV). Based on this, it has attracted a great deal of attention for applications in ultraviolet light-emitting devices (LED) and photodetectors. There are many preparation methods to prepare ZnO films, such as metal organic chemical vapor deposition (MOCVD), magnetron sputtering, vacuum thermal evaporation, and so on. Among them, there are many advantages on using magnetron sputtering to form ZnO thin films, such as good adhesion, good thickness uniformity, high density of films, so we take advantage of this method in our experiment. In this work, we present a simple, rapid and cost effective method to fabricate ordered periodic substrates by preparing single layer polystyrene microspheres masks, with 300, 600, 800and 1100 nm in diameters. Then the layer of zinc oxide thin films on the mask by RF magnetron sputtering technique have been deposited, and two-dimensional zinc oxide nano-array samples were obtained at last. Using this active plasmonic substrate, the optical properties of ZnO films on polystyrene microspheres template has been investigated.

Citation Download Citation

Xiu Li, Xiu Yan Chen, Gao Chao Zhu, Shan Shan Wang, and Si Yu Chen "Optical properties of two-dimensional ZnO array generated by template method", Proc. SPIE 10156, Hyperspectral Remote Sensing Applications and Environmental Monitoring and Safety Testing Technology, 101561F (25 October 2016); https://doi.org/10.1117/12.2247056

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