Fabrication of polymer-based multimode interference optical splitters by UV-based soft imprint lithography

Yuxin Liang; Xiuyou Han; Yuqing Luo; Yiying Gu; Zhenlin Wu; Mingshan Zhao

doi:10.1117/12.2243625

25 October 2016 Fabrication of polymer-based multimode interference optical splitters by UV-based soft imprint lithography

Yuxin Liang, Xiuyou Han, Yuqing Luo, Yiying Gu, Zhenlin Wu, Mingshan Zhao

Author Affiliations +

Proceedings Volume 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials; 968503 (2016) https://doi.org/10.1117/12.2243625
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

A polymer-based multimode interference (MMI) optical splitter chip has been fabricated through UV-based soft imprint lithography (Soft UV-NIL) technique. Propagation loss and bending loss are considered during the chip design in order to decrease the insertion loss. UV curable fluorinated acrylate resin is used due to its low material absorbing loss. 1×4 cascaded MMI splitter is fabricated and measured at 1550 nm optical wavelength and an average 12.38 dB insertion loss is obtained together with an 1.23 dB uniformity.

Citation Download Citation

Yuxin Liang, Xiuyou Han, Yuqing Luo, Yiying Gu, Zhenlin Wu, and Mingshan Zhao "Fabrication of polymer-based multimode interference optical splitters by UV-based soft imprint lithography", Proc. SPIE 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 968503 (25 October 2016); https://doi.org/10.1117/12.2243625

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available