Paper
31 October 2016 Experiments of diffractive optical elements obtained by ion plasma etching for aiming and display devices
Yanina A. Grad, Polina I. Malinina, Sergey B. Odinokov, Haik R. Sagatelyan, Artem B. Solomashenko
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Abstract
In this article analysis the possibility of using ion-plasma technology for etching the diffractive optical elements (DOE) directly in the glass, not in a layer of photosensitive material is described. Experimental samples on the light guide substrates for displays and signs-symbolic information indicators are obtained, as well as their basic parameters, such as the depth and shape of the surface topography and the diffraction efficiency are investigated. The experimental results showed the fundamental possibility of manufacturing the DOEs directly on the glass for the display of information systems.
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Yanina A. Grad, Polina I. Malinina, Sergey B. Odinokov, Haik R. Sagatelyan, and Artem B. Solomashenko "Experiments of diffractive optical elements obtained by ion plasma etching for aiming and display devices", Proc. SPIE 10022, Holography, Diffractive Optics, and Applications VII, 100221Z (31 October 2016); https://doi.org/10.1117/12.2246245
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KEYWORDS
Diffractive optical elements

Glasses

Plasma etching

Ions

Etching

Waveguides

Diffraction gratings

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