Fabrication of 3D embedded hollow structures inside polymer dielectric PMMA with femtosecond laser

Chong Zheng; Tao Chen; Anming Hu; Shibing Liu; Junwei Li

doi:10.1117/12.2245295

9 November 2016 Fabrication of 3D embedded hollow structures inside polymer dielectric PMMA with femtosecond laser

Chong Zheng, Tao Chen, Anming Hu, Shibing Liu, Junwei Li

Proceedings Volume 10018, Advanced Laser Processing and Manufacturing; 1001804 (2016) https://doi.org/10.1117/12.2245295
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

Recent progresses in femtosecond laser (fs) manufacturing have already proved that fs laser is a powerful tool in three dimensional internal structure fabrications. However, most studies are mainly focused on realize such structures in inorganic transparent dielectric, such as photosensitive glass and fused silica, etc. In this study, we present two methods to fabricate embedded internal 3D structures in a polymer dielectric material polymethyl methacrylate (PMMA). Both continuous hollow structure such as microfluidic channels and discrete hollow structures such as single microcavities are successfully fabricated with the help of femtosecond lasers. Among them, complicated 3D microchannel with a total length longer than 10mm and diameters around 80μm to 200μm are fabricated with a low repetition rate Ti: sapphire femtosecond laser by direct laser writing at a speed ranging from 25μm/s to 2000μm/s; microcavities which function as concave microball lenses (CMBLs) and can be applied in super-wide-angle imaging are fabricated with a high repetition rate femtosecond fiber laser due to the distinct heat accumulation effect after 5s irradiation with the tightly focused fs laser beam. These new approaches proved that femtosecond laser direct writing technology has great application potential in 3D integrated devices manufacturing in the future.

Citation Download Citation

Chong Zheng, Tao Chen, Anming Hu, Shibing Liu, and Junwei Li "Fabrication of 3D embedded hollow structures inside polymer dielectric PMMA with femtosecond laser", Proc. SPIE 10018, Advanced Laser Processing and Manufacturing, 1001804 (9 November 2016); https://doi.org/10.1117/12.2245295

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