Optical methods for correction of surface acoustic wave sensors topology

Dmitry P. Lukyanov; Sergey Shevchenko; Alexander Kukaev; Daniil Safronov

doi:10.1117/12.2246438

9 November 2016 Optical methods for correction of surface acoustic wave sensors topology

Dmitry P. Lukyanov, Sergey Shevchenko, Alexander Kukaev, Daniil Safronov

Proceedings Volume 10018, Advanced Laser Processing and Manufacturing; 100180H (2016) https://doi.org/10.1117/12.2246438
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

Nowadays surface acoustic wave sensors are produced using a photolithography method. It is expensive in small series production and do not allow further topology correction, which is important for inertial sensors. In this case, a laser ablation method seems promising. It does not require a photomask and can achieve a good matching of topologies produced on opposite sides of the wafer. Several delay lines were produced using a proposed technique. Its characteristics were explored and discussed.

Citation Download Citation

Dmitry P. Lukyanov, Sergey Shevchenko, Alexander Kukaev, and Daniil Safronov "Optical methods for correction of surface acoustic wave sensors topology", Proc. SPIE 10018, Advanced Laser Processing and Manufacturing, 100180H (9 November 2016); https://doi.org/10.1117/12.2246438

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