Development of swinging part profilometer for optics

Peng Zhang; Jie Li; Guoyu Yu; David D. Walker

doi:10.1117/12.2256295

11 November 2016 Development of swinging part profilometer for optics

Peng Zhang, Jie Li, Guoyu Yu, David D. Walker

Proceedings Volume 10151, Optics and Measurement International Conference 2016; 101510B (2016) https://doi.org/10.1117/12.2256295
Event: Optics and Measurement 2016 International Conference, 2016, Liberec, Czech Republic

Abstract

A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.

Citation Download Citation

Peng Zhang, Jie Li, Guoyu Yu, and David D. Walker "Development of swinging part profilometer for optics", Proc. SPIE 10151, Optics and Measurement International Conference 2016, 101510B (11 November 2016); https://doi.org/10.1117/12.2256295

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