Losses in TiO2/SiO2 multilayer coatings

Jiří Budasz; Jan Huťka; Jan Václavík

doi:10.1117/12.2257232

11 November 2016 Losses in TiO₂/SiO₂ multilayer coatings

Jiří Budasz, Jan Huťka, Jan Václavík

Proceedings Volume 10151, Optics and Measurement International Conference 2016; 101510R (2016) https://doi.org/10.1117/12.2257232
Event: Optics and Measurement 2016 International Conference, 2016, Liberec, Czech Republic

Abstract

This paper deals with optical losses in the coatings consisting of a combination of titanium dioxide (TiO₂) and silicon dioxide (SiO₂) layers evaporated by the ion beam assisted deposition (IBAD). This combination is commonly used for optical coatings as a standard choice for antireflective or any other optical filter in the visible and near IR range. Although the technology has been known for decades, we point out that some undescribed parasite losses can still appear and we show how to deal with them. In fact, in some cases, the losses made the target coating even inapplicable. In this paper we try to investigate the origin of the losses and we describe the deposition parameters which allow us to reduce or completely remove them. We determined whether the losses are proportional to the total thickness of the coating or to the number of layers. The influence of scattering was measured as well. Deposition parameters which were studied are the substrate temperature, discharge voltage of the assisting ion gun, oxygen flow of the assisting ion gun and the deposition rate, especially its starting curve. Influence of the post process annealing was studied as well. Starting curve of the deposition rate of SiO₂ layer and the amount of oxygen flowing through the assisting ion gun were found as a crucial parameters.

Citation Download Citation

Jiří Budasz, Jan Huťka, and Jan Václavík "Losses in TiO₂/SiO₂ multilayer coatings", Proc. SPIE 10151, Optics and Measurement International Conference 2016, 101510R (11 November 2016); https://doi.org/10.1117/12.2257232

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Ions

Annealing

Multilayers

Light scattering

Scattering

Oxygen

Transmittance

Show All Keywords

Keywords/Phrases

Search In:

Publication Years