The study of fast measurement hexahedron verticality error by wavefront interferometer

Shijun Peng; Songtao Gao; Dongcheng Wu; Erlong Miao

doi:10.1117/12.2246394

24 November 2016 The study of fast measurement hexahedron verticality error by wavefront interferometer

Shijun Peng, Songtao Gao, Dongcheng Wu, Erlong Miao

Proceedings Volume 10023, Optical Metrology and Inspection for Industrial Applications IV; 100230C (2016) https://doi.org/10.1117/12.2246394
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

This paper proposes a method to measure hexahedron vertical error based on wavefront interferometer and collimator. The setup of the measurement system and measurement steps is described. Comparing the vertical error of the same hexahedral surface adjacent measured by coordinate measurement machine, the validity of the measurement method is verified. Then not only the verticality error, but also form and shape error data of the two measured surface can be derived. The verticality error of adjacent surface is measured by the combination measurement method. Then surface figure error data for the two surfaces is measured by wavefront interferometer. The form and shape error data of one surface relative to the other can be obtained by added the verticality error to the surface figure error. This is very important in the part's error correction machining process. The effectiveness of the processing method has been verified by experiment. This method can achieve high measurement accuracy of 0.5″ and can be extended to high-precision shape and position errors measurement for other polyhedral parts.

Citation Download Citation

Shijun Peng, Songtao Gao, Dongcheng Wu, and Erlong Miao "The study of fast measurement hexahedron verticality error by wavefront interferometer", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230C (24 November 2016); https://doi.org/10.1117/12.2246394

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KEYWORDS

Collimators

Interferometers

Wavefronts

Charge-coupled devices

Error analysis

Autocollimators

Prisms

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