Numerical simulation research and applications on scattering imaging of surface defects on optical components

Huiting Chai; Pin Cao; Yongying Yang; Chen Li; Fan Wu; Yihui Zhang; Haoliang Xiong; Lin Zhou; Kai Yan; Wenlin Xu; Dong Liu; Jian Bai; Yibing Shen

doi:10.1117/12.2245430

24 November 2016 Numerical simulation research and applications on scattering imaging of surface defects on optical components

Huiting Chai, Pin Cao, Yongying Yang, Chen Li, Fan Wu, Yihui Zhang, Haoliang Xiong, Lin Zhou, Kai Yan, Wenlin Xu, Dong Liu, Jian Bai, Yibing Shen

Author Affiliations +

Proceedings Volume 10023, Optical Metrology and Inspection for Industrial Applications IV; 100230L (2016) https://doi.org/10.1117/12.2245430
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

The principle of microscopic scattering dark-field imaging is adopted in surface defects evaluation system (SDES) for large fine optics. However, since defects are of micron or submicron scale, scattering imaging cannot be described simply by geometrical imaging. In this paper, the simulation model of the electromagnetic field in defect scattering imaging is established on the basis of Finite-Difference Time-Domain (FDTD) method to study the scattering imaging properties of rectangular and triangular defects with different sizes by simulation. The criterion board with scribed lines and dots on it is used to carry out experiments scattering imaging and obtain grayscale value distributions of scattering dark-field images of scribed lines. The experiment results are in good agreement with the simulation results. Based on the above analysis, defect width extraction width is preliminary discussed. Findings in this paper could provide theoretical references for defect calibration in optical fabrication and inspection.

Citation Download Citation

Huiting Chai, Pin Cao, Yongying Yang, Chen Li, Fan Wu, Yihui Zhang, Haoliang Xiong, Lin Zhou, Kai Yan, Wenlin Xu, Dong Liu, Jian Bai, and Yibing Shen "Numerical simulation research and applications on scattering imaging of surface defects on optical components", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100230L (24 November 2016); https://doi.org/10.1117/12.2245430

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