Soft X-ray microscope with nanometer spatial resolution and its applications

P. W. Wachulak; A. Torrisi; A. Bartnik; L. Wegrzynski; T. Fok; Z. Patron; H. Fiedorowicz

doi:10.1117/12.2259877

8 December 2016 Soft X-ray microscope with nanometer spatial resolution and its applications

P. W. Wachulak, A. Torrisi, A. Bartnik, L. Wegrzynski, T. Fok, Z. Patron, H. Fiedorowicz

Proceedings Volume 10159, Laser Technology 2016: Progress and Applications of Lasers; 101590W (2016) https://doi.org/10.1117/12.2259877
Event: XIth Symposium on Laser Technology, 2016, Jastarnia, Poland

Abstract

A compact size microscope based on nitrogen double stream gas puff target soft X-ray source, which emits radiation in water-window spectral range at the wavelength of λ = 2.88 nm is presented. The microscope employs ellipsoidal grazing incidence condenser mirror for sample illumination and silicon nitride Fresnel zone plate objective for object magnification and imaging. The microscope is capable of capturing water-window images of objects with 60 nm spatial resolution and exposure time as low as a few seconds. Details about the microscopy system as well as some examples of different applications from various fields of science, are presented and discussed.

Citation Download Citation

P. W. Wachulak, A. Torrisi, A. Bartnik, L. Wegrzynski, T. Fok, Z. Patron, and H. Fiedorowicz "Soft X-ray microscope with nanometer spatial resolution and its applications", Proc. SPIE 10159, Laser Technology 2016: Progress and Applications of Lasers, 101590W (8 December 2016); https://doi.org/10.1117/12.2259877

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