Self-referenced interferometer for form measurement of hollow cylinders

Martin Šarbort; Šimon Řeřucha; Miroslava Holá; Zdeněk Buchta; Josef Lazar

doi:10.1117/12.2262989

23 December 2016 Self-referenced interferometer for form measurement of hollow cylinders

Martin Šarbort, Šimon Řeřucha, Miroslava Holá, Zdeněk Buchta, Josef Lazar

Proceedings Volume 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 101421Y (2016) https://doi.org/10.1117/12.2262989
Event: 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2016, Jasna, Slovakia

Abstract

We present a new self-referenced interferometer for the form measurement of hollow cylindrical tubes that provides the accuracy in the micrometer range. It is based on a simple and robust setup where the reference and object waves are represented by the central and peripheral parts, respectively, of the conical wave generated by a single axicon. The inteferogram is characterized by a closed-fringe pattern with a circular carrier which allows for the interference phase demodulation using spatial synchronous detection. The misalignment aberrations are corrected by an iterative computational procedure. The measurement capabilities of the interferometer are experimentally tested for the glass and stainless steel tubes with lengths from 220 mm to 600 mm.

Citation Download Citation

Martin Šarbort, Šimon Řeřucha, Miroslava Holá, Zdeněk Buchta, and Josef Lazar "Self-referenced interferometer for form measurement of hollow cylinders", Proc. SPIE 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 101421Y (23 December 2016); https://doi.org/10.1117/12.2262989

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