A low actuation voltage bistable MEMS switch: design, fabrication and preliminary testing

Ilya V. Uvarov; Victor V. Naumov; Olga M. Koroleva; Elena I. Vaganova; Ildar I. Amirov

doi:10.1117/12.2266439

30 December 2016 A low actuation voltage bistable MEMS switch: design, fabrication and preliminary testing

Ilya V. Uvarov, Victor V. Naumov, Olga M. Koroleva, Elena I. Vaganova, Ildar I. Amirov

Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241A (2016) https://doi.org/10.1117/12.2266439
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

Electrostatically actuated MEMS switch with the resistive contact is presented. Design of the switch includes the active contact breaking mechanism, which allows to detach the beam from the signal electrode in case of sticking. The mechanism is realized by the presence of two driving electrodes under the beam. The switch is fabricated by the surface micromachining. Finite element simulation and experimental investigation of the switch in a cold regime are performed.

Citation Download Citation

Ilya V. Uvarov, Victor V. Naumov, Olga M. Koroleva, Elena I. Vaganova, and Ildar I. Amirov "A low actuation voltage bistable MEMS switch: design, fabrication and preliminary testing", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241A (30 December 2016); https://doi.org/10.1117/12.2266439

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