Paper
30 December 2016 The precision seismometer based on planar electrochemical transducer
A. S. Shabalina, V. G. Krishtop
Author Affiliations +
Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241K (2016) https://doi.org/10.1117/12.2267099
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation
Abstract
In this paper we investigate the possibility of applying a planar electrochemical trancducer (ECT) as a sensing element for a precision seismometer with a high inertial mass. The precision seismometer based on simplest planar ECT was manufactured and tested. We investigated the amplitude-frequency and volt-ampere characteristics, self-noise level and the transducer’s impedance frequency dependence. One of the key characteristics for the seismometer is the intrinsic noise level, this work focuses on the self-noise level.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. S. Shabalina and V. G. Krishtop "The precision seismometer based on planar electrochemical transducer", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241K (30 December 2016); https://doi.org/10.1117/12.2267099
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Cited by 1 scholarly publication.
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KEYWORDS
Sensors

Electrodes

Transducers

Amplifiers

Data acquisition

Silicon

Manufacturing

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