Paper
30 December 2016 Numerical simulation of thin-film microthermocouple for the research of dissipation in tunneling contact
Vladislav V. Kravchenko, Vladimir A. Petukhov
Author Affiliations +
Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102242A (2016) https://doi.org/10.1117/12.2266745
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation
Abstract
Study of thermoelectric phenomenon in tunnel contact may discover novel concepts of thermoelectric devices design and improve efficiency of such devices. Application of thin-film microthermocouples for local heat flux measurements is discussed. Numerical modeling of existing and proposed microthermocouples was performed, and conversion coefficients for input power were obtained. Preliminary experiments were performed and from its results new thermocouple designs with better sensitivity were proposed.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladislav V. Kravchenko and Vladimir A. Petukhov "Numerical simulation of thin-film microthermocouple for the research of dissipation in tunneling contact", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102242A (30 December 2016); https://doi.org/10.1117/12.2266745
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Electrodes

Thin films

Silicon

Scanning tunneling microscopy

Thermoelectric materials

Oxides

Etching

Back to Top