Fundamentals of the fast neutral beams diagnostics

V. Kudrya; Yu. Maishev

doi:10.1117/12.2266889

30 December 2016 Fundamentals of the fast neutral beams diagnostics

V. Kudrya, Yu. Maishev

Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102242C (2016) https://doi.org/10.1117/12.2266889
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

Physical principles of fast neutral beams diagnostics methods are considered. In the opening sections an analysis of the methods intended for measurement of beam composition and energy characteristics of the beam components is presented. For the high resolution Doppler spectroscopy method some relations for energy resolution are derived. For the ionization method an approach to the atomic content calculations is developed in cases of a working gas like H₂, N₂, O₂. Further on, the secondary electron emission, calorimetric, and quartz resonator probes are considered. Dependences of the probe responses on the beam parameters are presented. The results obtained can be used for development and design of fast neutral beams diagnostics systems.

Citation Download Citation

V. Kudrya and Yu. Maishev "Fundamentals of the fast neutral beams diagnostics", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102242C (30 December 2016); https://doi.org/10.1117/12.2266889

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available